Vacuum pump
Two non-contact screw rotors compress gas without oil in the chamber. High capacity, deep vacuum.
Typical range
5–200 HP, down to 0.01 mbar with booster
Best for
Semiconductor, coating, freeze drying, high-purity industrial vacuum.
Operating principle
Two non-contact screw rotors compress gas without oil in the chamber. Timing gears synchronize the rotors; cooling is via an air- or water-jacket. Process pumps often use an N₂ purge for contamination control.
Efficiency notes
High capacity, deep vacuum, oil-free. Best for continuous high-vacuum industrial use.
Selection guidance
Semiconductor, coating, freeze drying, high-purity processes. Pair with a booster for ultra-high vacuum.
Components
- Male & female screw rotors
- Timing gears
- Air or water cooling jacket
- Nitrogen purge (process pumps)
- VSD controller
Common issues
- Process deposits on rotors → reduced capacity, eventual seizure
- High exhaust pressure → blocked abatement / scrubber downstream
- Bearing failure → contaminated lube oil, missed PM
Maintenance
- Follow OEM rotor wash / purge schedule for the process gas
- Lube-oil change per hours (typ. 4,000–8,000 hrs)
- Vibration analysis annually
Field tips
- Follow OEM rotor wash/purge — process deposits reduce capacity and seize rotors
- Blocked downstream abatement raises exhaust pressure and overheats the pump
- Annual vibration analysis catches bearing trends