Two non-contact screw rotors compress gas without oil in the chamber. High capacity, deep vacuum.
Typical range
5–200 HP, down to 0.01 mbar with booster
Best for
Semiconductor, coating, freeze drying, high-purity industrial vacuum.
Components
- Male & female screw rotors
- Timing gears
- Air or water cooling jacket
- Nitrogen purge (process pumps)
- VSD controller
Common issues
- Process deposits on rotors → reduced capacity, eventual seizure
- High exhaust pressure → blocked abatement / scrubber downstream
- Bearing failure → contaminated lube oil, missed PM
Maintenance
- Follow OEM rotor wash / purge schedule for process gas
- Lube oil change per hours (typ. 4,000–8,000 hrs)
- Vibration analysis annually